“Coherent Fourier Scatterometry for detection of nanoparticles and nanostructure characterization”

Dra. Silvania Pereira

In this talk I will present an optical technique based on illuminating isolated nanoparticles ou nanostructures on deposited on surfaces with a focussed laser beam and detecting their scattered field. The far field signatures, namely the amplitude, phase, polarization of the scattered field, accompanied by rigorous diffraction simulations and priori information are used to retrieve relevant information about the nanostructures on the substrate.
We will show experimental results of reconstruction of gratings written on silicon as well as the detection of low optical contrast subwavelength particles on surfaces.
This technique is non-invasive and can be applied in-line to inspect surfaces for defects, contamination or to characterize nanostructures.